Plasma-resistant surface treatment CVD Yttria
CVD yttria is a high-purity protective film with excellent plasma resistance.
"CVD Yttria" is a transparent protective film with excellent plasma resistance. It is a dense film with high adhesion, making it effective as a protective film for windows used in plasma treatment processes (F-based, Cl-based).
- 企業：テクノクオーツ
- 価格：Other
