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Ittria membrane Product List

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Plasma-resistant surface treatment CVD Yttria

CVD yttria is a high-purity protective film with excellent plasma resistance.

"CVD Yttria" is a transparent protective film with excellent plasma resistance. It is a dense film with high adhesion, making it effective as a protective film for windows used in plasma treatment processes (F-based, Cl-based).

  • Surface treatment contract service
  • Ittria membrane

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